Prof. Kei Hattori Profile

Prof. Kei Hattori

Designated Professor at Nagoya Univ.

Publications (4)

Proceedings Article | 16 September 2022 Paper

Freeze point monitoring system for freeze cleaning method

Masaya Kamiya, Kensuke Demura, Minami Nakamura, Kei Hattori

Proceedings Volume 12325, 123250B (2022) https://doi.org/10.1117/12.2640652

KEYWORDS: Supercooling, Photomasks, Particles, Liquids, Temperature metrology, Process control, Stochastic processes, Solids, Cryogenics, Water

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SPIE Journal Paper | 6 October 2020 Open Access

Particle and pattern discriminant freeze-cleaning method

Kei Hattori, Daisuke Matsushima, Kensuke Demura, Masaya Kamiya

JM3, Vol. 19, Issue 04, 044401, (October 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.4.044401

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Proceedings Article | 23 March 2020 Paper

Unique freeze cleaning technology

Daisuke Matsushima, Kensuke Demura, Sadayuki Jimbo, Kei Hattori

Proceedings Volume 11326, 113260P (2020) https://doi.org/10.1117/12.2551972

KEYWORDS: Particles, Photomasks, Solids, Temperature metrology, Liquids, Cryogenics, Quartz, Semiconductors, Semiconducting wafers, Solid state physics

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Proceedings Article | 12 June 2018 Paper

Dry etching technologies for Cr film

Kei Hattori, Takashi Miyamoto, Yoshinori Iino, Shunpei Kodama, Yoshie Okamoto, Kazuki Nakazawa, Makoto Karyu, Hideaki Terakado, Hiroki Shirahama, Hirotsugu Ita, Tomoaki Yoshimori, Hidehito Azumano, Makoto Muto, Mumenori Iwami

Proceedings Volume 10807, 1080708 (2018) https://doi.org/10.1117/12.2502053

KEYWORDS: Chromium, Etching, Chlorine, Photomasks, Plasma, Dry etching, Critical dimension metrology, Mechatronics, Quartz, Manufacturing

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