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Kiyohito Mukai
at Panasonic Corp
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Publications (1)
Proceedings Article | 3 May 2004 Paper
CMP dummy pattern insertion with reduction in power supply voltage drops
Kiyohito Mukai, Junichi Shimada, Mitsumi Ito, Masanori Hirofuji, Hiroyuki Tsujikawa
Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.535991
KEYWORDS: Capacitors, Chemical mechanical planarization, Power supplies, Semiconductors, Manufacturing, Capacitance, Logic, Polishing, Lithography, Molybdenum
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