Mr. Kohei Kawamura Profile

Kohei Kawamura

at Hitachi High-Tech Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 25 May 2022 Presentation + Paper

Yoshihide Yamaguchi, Sumiko Fujisaki, Kazunori Shinoda, Hiroyuki Kobayashi, Kiyohiko Sato, Kohei Kawamura, Kenji Maeda, Masaru Izawa

Proceedings Volume 12056, 1205602 (2022) https://doi.org/10.1117/12.2614198

KEYWORDS: Semiconductor process technologies, Isotropic etching, Dry etching, Vapor etching, Etching, Lanthanum, Cobalt, Adsorption

Proceedings Article | 20 March 2018 Paper

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Yuko Hanaoka, Kohei Kawamura, Masaru Izawa, Kenji Ishikawa, Masaru Hori

Proceedings Volume 10589, 105890I (2018) https://doi.org/10.1117/12.2297241

KEYWORDS: Tungsten, Etching, Plasma, Isotropic etching, Annealing, Silicon

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Keywords/Phrases