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Marec Timmermann
at Fraunhofer-ISIT
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Publications (1)
Proceedings Article | 5 March 2021 Presentation + Paper
A 2D circular-scanning piezoelectric MEMS mirror for laser material processing
F. Senger, S. Gu-Stoppel, L. Wen, J. Albers, M. Timmermann, Stefan Bruns, G. Piechotta, U. Bünting, M. Schulz-Ruhtenberg
Proceedings Volume 11697, 1169704 (2021) https://doi.org/10.1117/12.2584075
KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, Polygon scanners, Laser processing, Beam steering, Superposition, Signal processing, Reflectivity, Position sensors
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