Dr. Marijan Macek
at Univ of Ljubljana
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 26, 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Carbon, Optical lithography, Polymers, Ultraviolet radiation, Particles, Composites, Photoresist materials, Epoxies, Nanocomposites, Photomicroscopy

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