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Matthias Plock
at Zuse Institute Berlin
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Publications (2)
Proceedings Article | 23 August 2023 Presentation
Efficient reconstruction of model parameters using Bayesian target-vector optimization
Matthias Plock, Sven Burger, Philipp-Immanuel Schneider
Proceedings Volume PC12619, PC1261905 (2023) https://doi.org/10.1117/12.2673590
KEYWORDS: Mathematical optimization, Optical metrology, Monte Carlo methods, Education and training, Process modeling, Sand, Global Positioning System, Computer programming languages
Proceedings Article | 20 June 2021 Presentation + Paper
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Matthias Plock, Sven Burger, Philipp-Immanuel Schneider
Proceedings Volume 11783, 117830J (2021) https://doi.org/10.1117/12.2592266
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