Dr. Remko Van den Hurk Profile

Dr. Remko Van den Hurk

at Applied NanoTools Inc

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Publications (2)

Proceedings Article | 3 October 2023 Presentation + Paper

Fabrication and characterization of diffractive optics for EUV applications

Remko van den Hurk, Rob Peters, Mirwais Aktary

Proceedings Volume 12694, 126940C (2023) https://doi.org/10.1117/12.2677780

KEYWORDS: Zone plates, Ruthenium, Chromium, Scanning transmission electron microscopy, Etching, Silicon nitride, Fabrication, Silicon carbide, EUV optics, Extreme ultraviolet

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Proceedings Article | 9 September 2019 Presentation

Single exposure for double-sided zone plate optics for soft and hard x-ray imaging (Conference Presentation)

Robert Peters, Christian Fella, Dominik Müller, Mansi Shukla, Remko van den Hurk, Mirwais Aktary

Proceedings Volume 11112, 111120P (2019) https://doi.org/10.1117/12.2530590

KEYWORDS: Zone plates, X-ray optics, Electron beam lithography, Hard x-rays, X-ray imaging, Lithography, X-ray diffraction, X-rays, Optical alignment, Metals

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