Mr. Robert van de Laar Profile

Robert van de Laar

at SCIL Nanoimprint Solutions

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

The FabSCIL platform: 200 and 300mm full wafer NIL for nanophotonics

Marc Verschuuren, Bradley Williams, Mohammad Ramezani, Robert van de Laar, Jeroen Visser, Gert-Jan Hurxkens, Rob Voorkamp

Proceedings Volume PC12956, PC1295609 (2024) https://doi.org/10.1117/12.3003683

KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Nanophotonics, Wafer-level optics, Scatterometry, Refractive index, Optical alignment, Metalenses, Etching, Reproducibility

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