Dr. Sekar Ponnusamy
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Diffraction, Polarization, Reflectivity, Scatterometry, Inverse problems, Wave propagation, Spatial resolution, Inverse optics, Diffraction gratings, Maxwell's equations

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