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Shiqi Yang
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Publications (1)
Proceedings Article | 18 March 2024 Paper
Application of IBE etching process in EBAPS device
Proceedings Volume 13104, 131045J (2024) https://doi.org/10.1117/12.3023680
KEYWORDS: Etching, Surface roughness, Passivation, Silicon, Back illuminated sensors, Light sources and illumination, Signal to noise ratio, Ion beams, Aluminum, CMOS sensors
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