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Shiqi Yang
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Publications (1)
Proceedings Article | 18 March 2024 Paper
Realization of EBAPS imaging under 10-5lx illumination based on micro-nano preparation
Hesheng Tan, Yaobin Li, Yongfa Dong, Huaiyun Fan, Shiqi Yang, Changbao Deng, Xin Zhang, Linwei Song
Proceedings Volume 13104, 131045E (2024) https://doi.org/10.1117/12.3023672
KEYWORDS: Light sources and illumination, Dark current, Passivation, Film thickness, Semiconductors, Wet etching, Dry etching, Atomic layer deposition, Avalanche photodetectors, Vacuum
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