Prof. Xiaoyan Hu Profile

Prof. Xiaoyan Hu

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 31 May 2023 Paper

Effect of the cone angle of incident light beam on the performance characterization of MEMS F-P filter

Meng Zhang, Cheng ao Yang, Weiping Wang, Jing Cao, Song Liu, Xiaoyan Hu

Proceedings Volume 12711, 127110L (2023) https://doi.org/10.1117/12.2684221

KEYWORDS: Mirrors, Tunable filters, Transmittance, Optical filters, Microelectromechanical systems

Read Abstract +

The tunability of optical transmittance spectra can be available by mounting one of the mirrors of the Fabry-Perrot cavity on a movable structure. The F-P filter prepared by adopting MEMS process can realize the advantages of miniaturization, array, and high output. The size of the MEMS F-P filter can be reduced to a few hundred micrometers. This feature introduces a new problem for the characterization of optical performance, that is, the incident light needs to be focused onto the mirror with a size of a few hundred micrometers. However, in the actual test, the incident light with a hundred-micron spot is usually a convergent beam with a certain cone angle. It is found that through theoretical analysis, compared to parallel incident light, the convergent light beam passed through the F-P cavity leads to the decrease at peak transmittance and the broadening of full width at half maximum. The reason for that was the converging light with a cone angle passing through the F-P cavity had different incident angles and caused diverse optical path difference. As a result, the light emitting from the cavity with various wavelength would appear in the transmission spectra. In summary, the test results under the converging light could not truly reflect the performance of the F-P cavity and the influence of the cone angle of incident light beam on the performance characterization of MEMS F-P filter was analyzed by theoretical arithmetic and simulation.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years