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Yantao Xia

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Publications (1)

Proceedings Article | 26 February 2021 Presentation

Directional and selective patterning of EUV absorbers

Xia Sang, Yantao Xia, Jane Chang, Philippe Sautet

Proceedings Volume 11615, 1161503 (2021) https://doi.org/10.1117/12.2585410

KEYWORDS: Extreme ultraviolet, Optical lithography, Reactive ion etching, Etching, Chemistry, Thermodynamics, Metals, Ion beams, Complex systems, Anisotropic etching

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