Dr. Yasuaki Hori Profile

Dr. Yasuaki Hori

at National Institute of Advanced Industrial Science and Technology

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Publications (1)

Proceedings Article | 10 August 2023 Presentation + Paper

Calibration system for photomask roundness based on a precision rotary table

Mariko Kajima, Kentaro Sugawara, Yasuaki Hori, Tsukasa Watanabe

Proceedings Volume 12619, 1261909 (2023) https://doi.org/10.1117/12.2673712

KEYWORDS: Photomasks, Calibration, Microscopes, Interferometers, Edge detection, Ultraviolet radiation, Standards development, Imaging systems, CCD image sensors, Beam diameter

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