Profiler is a popular metrology system to measure form shape error of aspherical surface, but precise measurement to big
relative aperture aspherical surface could not be achieved by traditional profiler with cartesian coordinate system. A new
profiler with polar coordinate system based in “small error” thoery is studied in this article. Firstly, the testing error of
this new profiler is analized and corrected. Then, the correction capability is vertified by sorting of computer simulated
testing results. In the end, the protyping profiler is explored, and the testing results are compared with Form Taylorsurf’s,
the accuracy of this new profiler is consistent with predictive analysis.
Key words: Profiler, aspherical surface, big relative aperture
The compensation method for the error of diamond tool's cutting edge is a bottle-neck technology to hinder the high accuracy aspheric surface's directly formation after single diamond turning. Traditional compensation was done according to the measurement result from profile meter, which took long measurement time and caused low processing efficiency. A new compensation
method was firstly put forward in the article, in which the correction of the error of diamond tool's cutting edge was done according to measurement result from digital interferometer. First, detailed theoretical calculation related with compensation method was deduced. Then, the effect after compensation was simulated by computer. Finally, φ50 mm work piece finished its diamond turning and new correction turning under Nanotech 250. Testing surface achieved high shape accuracy pv 0.137λ and rms=0.011λ, which approved the new compensation method agreed with predictive analysis, high accuracy and fast speed of error convergence.
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