Dr. Yiqi Wang Profile

Dr. Yiqi Wang

at Dalian Univ of Technology

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Publications (1)

Proceedings Article | 21 June 2019 Paper

Surface roughness measurement accuracy analysis of grinded silicon wafer by white light scanning interferometry (WLSI)

Linjie Zhao, Ping Zhou, Ying Yan, Qian Bai, YiQi Wang, Dongming Guo

Proceedings Volume 11056, 110562B (2019) https://doi.org/10.1117/12.2525241

KEYWORDS: Silicon, Semiconducting wafers, Error analysis, Objectives, Phase shifts, Interferometry, Atomic force microscopy, Analytical research, Interferometers, Modulation

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