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Yohei Takarada
at Nikon Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 20 September 2020 Presentation
A pattern transfer from semiconductors, and more: Nikon’s large-size photomask blanks for flat panel display
Proceedings Volume 11518, 115180T (2020) https://doi.org/10.1117/12.2575692
KEYWORDS: Photomasks, Semiconductors, Flat panel displays, Optical lithography, LCDs, Organic light emitting diodes, Lithography, Dry etching, Surface finishing, Polishing
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