Mr. Yuhe Shao
Research Assistant at Montana State Univ
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | October 1, 2005
JM3 Vol. 4 Issue 04
KEYWORDS: Mirrors, 3D scanning, Silicon, Etching, Microopto electromechanical systems, Microscopes, Confocal microscopy, Electrodes, 3D acquisition, Control systems

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5348, MOEMS Display and Imaging Systems II
KEYWORDS: Microelectromechanical systems, Oxides, Confocal microscopy, Microscopes, Mirrors, 3D acquisition, Etching, Electrodes, Silicon, 3D scanning

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