Prof. Yunbo B. He Profile

Prof. Yunbo B. He

at Guangdong Univ. of Technology

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Publications (1)

Proceedings Article | 6 January 2020 Paper

Fabrication of multi-layer micropillars array in micro-grooving technology

S. Xia, Y. He, S. J. Wang

Proceedings Volume 11383, 1138303 (2020) https://doi.org/10.1117/12.2522649

KEYWORDS: Manufacturing, Diamond machining, Nanolithography, Diamond, Surface roughness, Nanotechnology, 3D metrology, Optical lithography, Single point diamond turning

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