Mechanical errors related to interferometric radius of curvature measurements

Patrick J. McGhee; John Nemechek

doi:10.1117/12.605853

2 May 2005 Mechanical errors related to interferometric radius of curvature measurements; Technical Digest

Patrick J. McGhee, John Nemechek

Proceedings Volume 10315, Optifab 2005: Technical Digest; 1031519 (2005) https://doi.org/10.1117/12.605853
Event: Optifab 2005, 2005, Rochester, NY, United States

Abstract

The measurement of radius of curvature through the use of an interferometer can be a very accurate way to understand the properties of an optical surface. This process is completed by observing the distance between the cat's eye and confocal points of an optical piece. This type of measurement process, however, can include a number of errors if not executed properly. This paper presents and explains the major sources of mechanical errors that exist for radius of curvature measurements. The major mechanical errors that may occur are Abbe, cosine, and null cavity error. These errors are presented in a fashion such that they may be easily understood by someone who may not have an extensive optics background. Also, some techniques to test for and assess these errors will be displayed. In order to make extremely accurate measurements, on the order of a nanometer, one must greatly diminish the mechanical errors of a system before examining the effects of environmental errors.

Citation Download Citation

Patrick J. McGhee and John Nemechek "Mechanical errors related to interferometric radius of curvature measurements; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031519 (2 May 2005); https://doi.org/10.1117/12.605853

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available