Commissioning of the Montel nano-optics for the x-ray nanoprobe at Taiwan Photon Source (Conference Presentation)

Gung-Chian Yin; Shi-Hung Chang; Bo Yi Chen; Chien-Yu Lee; Bi-Hsuan Lin; Shao-Chin Tseng; Xiao-Yun Li; Huang-Yeh Chen; Jian-Xing Wu; Mau-Tsu Tang

doi:10.1117/12.2274909

3 October 2017 Commissioning of the Montel nano-optics for the x-ray nanoprobe at Taiwan Photon Source (Conference Presentation)

Gung-Chian Yin, Shi-Hung Chang, Bo Yi Chen, Chien-Yu Lee, Bi-Hsuan Lin, Shao-Chin Tseng, Xiao-Yun Li, Huang-Yeh Chen, Jian-Xing Wu, Mau-Tsu Tang

Author Affiliations +

Proceedings Volume 10389, X-Ray Nanoimaging: Instruments and Methods III; 103890A (2017) https://doi.org/10.1117/12.2274909
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

The diffraction-limited Montel mirrors, equipped at the X-ray Nanoprobe (XNP) at Taiwan Photon Source (TPS), provide a 40 nm focal spot and working distance 55 mm under the total beamline length of 69 m. The underneath holder supporting for the Montel mirrors is a 12 axes flexure based manipulators in which 10 out of the 12 axes are motorized. To monitor the position and stability of individual holder motion, a monitoring system consisted of three optical encoders and three- axes laser interferometers for angle movement is implemented. The gap width between the two mirrors and their orthogonality can be adjusted by a tilting sensor and a high magnification optical microscope. The focusing properties, phase and amplitude, after the Montel mirrors will be investigated by means of coherent Ptychography, as well as by zone plate imaging. An SEM in close cooperation with laser interferometers is equipped to precisely position the samples and conduct the on-the-fly scan. A high speed FPGA based circuit is developed to address signal from XRF, XAS, XEOL and XRD. Data is in tag with position and time information and been processed by computers to allow 5nm precision stage scanning free from mechanical feedback. The XNP at TPS is under commissioning since February 2017. The commissioning result, particularly the performance of the Montel mirrors will be reported in this presentation.

Conference Presentation

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Gung-Chian Yin, Shi-Hung Chang, Bo Yi Chen, Chien-Yu Lee, Bi-Hsuan Lin, Shao-Chin Tseng, Xiao-Yun Li, Huang-Yeh Chen, Jian-Xing Wu, and Mau-Tsu Tang "Commissioning of the Montel nano-optics for the x-ray nanoprobe at Taiwan Photon Source (Conference Presentation)", Proc. SPIE 10389, X-Ray Nanoimaging: Instruments and Methods III, 103890A (3 October 2017); https://doi.org/10.1117/12.2274909

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KEYWORDS

Mirrors

Nanoprobes

Interferometers

Scanning electron microscopy

X-rays

Laser stabilization

Optical encoders

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