Fabrication of a 3D nano-printing device

Jinseo Hong; Yusuke Masuda; Takashi Mineta

doi:10.1117/12.2317917

23 March 2018 Fabrication of a 3D nano-printing device

Jinseo Hong, Yusuke Masuda, Takashi Mineta

Proceedings Volume 10597, Nano-, Bio-, Info-Tech Sensors, and 3D Systems II; 105971A (2018) https://doi.org/10.1117/12.2317917
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2018, Denver, Colorado, United States

Abstract

In this paper, we demonstrate fabrication processes of dual atomic force microscopic (AFM) probe with embedded micro-channels and a nozzle hole for liquid delivering function for 3D printing in nano-scale. The nozzle and embedded micro-channels were successfully fabricated with under-surface connection and hydrophilic inner walls. The narrow trench opening remained above the micro-channel, was completely sealed by combination of Si thermal oxidation and subsequent SiO₂ sputtering deposition. Twin Si tips with an outlet nozzle hole and embedded micro-channel were fabricated with the developed fabrication process.

Citation Download Citation

Jinseo Hong, Yusuke Masuda, and Takashi Mineta "Fabrication of a 3D nano-printing device", Proc. SPIE 10597, Nano-, Bio-, Info-Tech Sensors, and 3D Systems II, 105971A (23 March 2018); https://doi.org/10.1117/12.2317917

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