Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement

Songjie Luo; Osami Sasaki; Samuel Choi; Takamasa Suzuki; Jixiong Pu

doi:10.1117/12.2502790

8 November 2018 Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement

Songjie Luo, Osami Sasaki, Samuel Choi, Takamasa Suzuki, Jixiong Pu

Author Affiliations +

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 108190N (2018) https://doi.org/10.1117/12.2502790
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Advanced signal processing is required to make exact measurements with nanometer order accuracy. A complex-valued interference signal of a white-light scanning interferometer (WLSI) obtained from the detected real-valued interference signal through Fourier transform provides an accurate position of an object surface with an error less than 4 nm. Moreover, the sampling points of the interference signal of the WLSI detected with a camera are corrected with the measured scanning positions which are obtained from an interference signal detected by using an optical band-pass filter. This correction method provides more accurate surface profiles with an error less than 2 nm. In experiments a surface profile with a step shape of 3 μm-width is measured accurately.

Citation Download Citation

Songjie Luo, Osami Sasaki, Samuel Choi, Takamasa Suzuki, and Jixiong Pu "Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108190N (8 November 2018); https://doi.org/10.1117/12.2502790

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