Microsphere-assisted imaging of sub-diffraction-limited features

Sébastien Marbach; Stephane Perrin; Paul Montgomery; Manuel Flury; Sylvain Lecler

doi:10.1117/12.2526086

21 June 2019 Microsphere-assisted imaging of sub-diffraction-limited features

Sébastien Marbach, Stephane Perrin, Paul Montgomery, Manuel Flury, Sylvain Lecler

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110560R (2019) https://doi.org/10.1117/12.2526086
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Observation of nanoscale elements through an optical microscope is often restricted by the resolving power of the optical system. Indeed, a white-light microscope allows the visualisation of objects having a size that is only just greater than half of the wavelength of the illumination used, in ideal cases, such as features of MOEMS- based components. In reality, imperfections or misalignment of the optical components makes this resolution limit worse. In 2011, Wang et al. introduced experimentally the phenomenon of two-dimensional super-resolution imaging through a glass microsphere. They showed that microsphere-assisted microscopy distinguishes itself from others by being able to perform label-free and full-field acquisitions. In addition, with only slight modifications of a classical white-light microscope, microsphere-assisted microscopy makes it possible to reach a lateral resolution of a few hundred nanometers. Recently, we successfully demonstrated the label-free combination of microsphere- assisted microscopy with interferometry. This work aims to compare performance of 2D imaging (microsphere- assisted microscopy) with 3D imaging (microsphere-assisted interference microscopy).

Citation Download Citation

Sébastien Marbach, Stephane Perrin, Paul Montgomery, Manuel Flury, and Sylvain Lecler "Microsphere-assisted imaging of sub-diffraction-limited features", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560R (21 June 2019); https://doi.org/10.1117/12.2526086

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