Multi-beam mask writer MBM-2000 (Conference Presentation)

Hiroshi Matsumoto; Keisuke Yamaguchi; Hayato Kimura; Noriaki Nakayamada

doi:10.1117/12.2586288

24 February 2021 Multi-beam mask writer MBM-2000 (Conference Presentation)

Hiroshi Matsumoto, Keisuke Yamaguchi, Hayato Kimura, Noriaki Nakayamada

Proceedings Volume 11610, Novel Patterning Technologies 2021; 116100Y (2021) https://doi.org/10.1117/12.2586288
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

A multi-beam mask writer MBM-2000 is developed for the 3 nm technology node. It is designed to expose EUV blanks with beamlets of total current 1.6 uA at high throughput. It also supports writing leading-edge photomasks by equipping a correction function for glass thermal expansion and high-speed data path. Fast writing modes are provided for middle-grade photomask writing. Inline function of pixel level dose correction (PLDC) is implemented to reduce mask turnaround time by replacing offline corrections with PLDC, with additional benefit of fidelity improvement by dose enhancement. In this paper, writing results of MBM-2000 are reported and discussed.

Conference Presentation

Citation Download Citation

Hiroshi Matsumoto, Keisuke Yamaguchi, Hayato Kimura, and Noriaki Nakayamada "Multi-beam mask writer MBM-2000 (Conference Presentation)", Proc. SPIE 11610, Novel Patterning Technologies 2021, 116100Y (24 February 2021); https://doi.org/10.1117/12.2586288

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available