Advanced variable-resolution at-wavelength metrology with a coded-mask-based x-ray wavefront sensor

Xianbo Shi; Zhi Qiao; Matthew Highland; Matthew Frith; Luca Rebuffi; Lahsen Assoufid

doi:10.1117/12.2635694

4 October 2022 Advanced variable-resolution at-wavelength metrology with a coded-mask-based x-ray wavefront sensor

Xianbo Shi, Zhi Qiao, Matthew Highland, Matthew Frith, Luca Rebuffi, Lahsen Assoufid

Proceedings Volume 12240, Advances in X-Ray/EUV Optics and Components XVII; 122400H (2022) https://doi.org/10.1117/12.2635694
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

A coded-mask-based X-ray wavefront sensing technique was recently developed at the Advanced Photon Source, aiming for the ultimate phase sensitivity, spatial resolution and high speed using deep-learning-based analysis. It is a versatile tool capable of single-shot reference-free measurements and scanning mode for the best resolution and noise robustness. This work extends its application in at-wavelength metrology to achieve variable-resolution analysis when combined with a short-focal-length focusing optic. We showcase the complete characterization of beryllium refractive lenses using the coded-mask-based method in a collimated-beam setup and a divergent-beam setup with large geometric magnifications. The collimated-beam measurement provides the lens thickness error over the entire optical aperture down to a micron spatial resolution. On the other hand, wavefront sensing with the divergent beam can provide detailed local information of the sample with a few tens of nanometer spatial resolution, ideal for investigating lens defects.

Conference Presentation

Citation Download Citation

Xianbo Shi, Zhi Qiao, Matthew Highland, Matthew Frith, Luca Rebuffi, and Lahsen Assoufid "Advanced variable-resolution at-wavelength metrology with a coded-mask-based x-ray wavefront sensor", Proc. SPIE 12240, Advances in X-Ray/EUV Optics and Components XVII, 122400H (4 October 2022); https://doi.org/10.1117/12.2635694

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available