Technologies and market trends for polymer MEMS in microfluidics and lab-on-chip

Geraldine Andrieux; Jean-Christophe Eloy; Eric Mounier

doi:10.1117/12.601554

22 January 2005 Technologies and market trends for polymer MEMS in microfluidics and lab-on-chip

Geraldine Andrieux, Jean-Christophe Eloy, Eric Mounier

Proceedings Volume 5718, Microfluidics, BioMEMS, and Medical Microsystems III; (2005) https://doi.org/10.1117/12.601554
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This article presents a synthesis of industrial activity in polymer microcomponents and their use in biological fields. Polymer microtechnologies have emerged in the 90s as a low cost alternative technology to Si and glass micromachining. The launching of the Steag microParts company in 1990 with the FZK Research Center and Pharmacia Biosensor patents, have launched these materials in the MEMS world. Polymers are expected to be increasingly used through the development of microfluidics for bio applications.

Citation Download Citation

Geraldine Andrieux, Jean-Christophe Eloy, and Eric Mounier "Technologies and market trends for polymer MEMS in microfluidics and lab-on-chip", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); https://doi.org/10.1117/12.601554

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