Study on annular polishing for a rectangle optical flat with high aspect ratio

Zhicheng Ma; Junfeng Li; Shumei Song

doi:10.1117/12.867489

6 October 2010 Study on annular polishing for a rectangle optical flat with high aspect ratio

Zhicheng Ma, Junfeng Li, Shumei Song

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76552D (2010) https://doi.org/10.1117/12.867489
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The annular polishing is used to manufacture a rectangle optical flat with high aspect ratio in this paper. To control the polishing conveniently, a theoretical model based on the Preston hypothesis is given. According to the model, the problems related to control the power and the edge effect occurred during the process are analyzed and practically solved. Finally, the surface PV of 60 nm was achieved.

Citation Download Citation

Zhicheng Ma, Junfeng Li, and Shumei Song "Study on annular polishing for a rectangle optical flat with high aspect ratio", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76552D (6 October 2010); https://doi.org/10.1117/12.867489

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