Approaches to airborne molecular contamination assessment

Sarah Riddle Vogt; Cristian Landoni

doi:10.1117/12.881654

20 April 2011 Approaches to airborne molecular contamination assessment

Sarah Riddle Vogt, Cristian Landoni

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79712I (2011) https://doi.org/10.1117/12.881654
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Airborne molecular contamination (AMC) assessment approaches can vary greatly between different fabs and even between different divisions within a given company. Some companies have very rigorous testing schedules (such as those needed to maintain tool warranties) while others feel AMC testing is only necessary when they are having a problem. While choosing to only test for AMC when a trouble arises may be cost effective in the short term it can have significant impacts on tools, in particular tool optics, and product losses due to defects which can cost significantly more in the long term than the AMC testing would have. Another critical issue in assessing AMC is what species you should be testing for. Some volatile species may not cause an issue in your process while part-per-trillion volume (pptv) amounts of others can do serious damage to your tools and/or products. Knowledge of which volatile compounds can cause problems in your applications and at what levels is crucial in deciding what type of AMC assessment to perform and at what frequency. Typically four classes of AMC are routinely monitored in clean rooms and tool environments: acids, bases, hydrocarbons, and refractory compounds. Real world examples will be presented using the solely solid-state trap collection methods utilized by SAES Pure Gas.

Citation Download Citation

Sarah Riddle Vogt and Cristian Landoni "Approaches to airborne molecular contamination assessment", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79712I (20 April 2011); https://doi.org/10.1117/12.881654

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available