Thin-film UV VCSELs and LEDs by electrochemical etching

Åsa Haglund; Filip Hjort; Johannes Enslin; Michael Bergmann; Munise Cobet; Giulia Cardinali; Nando Prokop; Lars Persson; Martin Guttmann; Luca Sulmoni; Neysha Lobo-Ploch; Tim Kolbe; Johan Gustavsson; Joachim Ciers; Tim Wernicke; Michael Kneissl

doi:10.1117/12.2612369

9 March 2022 Thin-film UV VCSELs and LEDs by electrochemical etching

Åsa Haglund, Filip Hjort, Johannes Enslin, Michael Bergmann, Munise Cobet, Giulia Cardinali, Nando Prokop, Lars Persson, Martin Guttmann, Luca Sulmoni, Neysha Lobo-Ploch, Tim Kolbe, Johan Gustavsson, Joachim Ciers, Tim Wernicke, Michael Kneissl

Author Affiliations +

Proceedings Volume PC12022, Light-Emitting Devices, Materials, and Applications XXVI; PC120220B (2022) https://doi.org/10.1117/12.2612369
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We will give an overview of state-of-the-art results and challenges to achieve high-performing III-nitride vertical-cavity surface-emitting lasers (VCSELs), with a particular focus on the requirements to push the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by electrochemical etching enabled the world’s first UV-B VCSEL. The use of dielectric mirrors yielded lasers with a very temperature-stable emission wavelength thanks to the negative thermo-optic coefficient of the mirrors. We have used the same etch methodology to also lift-off fully processed LEDs from their growth substrate to improve the light extraction efficiency.

Conference Presentation

Citation Download Citation

Åsa Haglund, Filip Hjort, Johannes Enslin, Michael Bergmann, Munise Cobet, Giulia Cardinali, Nando Prokop, Lars Persson, Martin Guttmann, Luca Sulmoni, Neysha Lobo-Ploch, Tim Kolbe, Johan Gustavsson, Joachim Ciers, Tim Wernicke, and Michael Kneissl "Thin-film UV VCSELs and LEDs by electrochemical etching", Proc. SPIE PC12022, Light-Emitting Devices, Materials, and Applications XXVI, PC120220B (9 March 2022); https://doi.org/10.1117/12.2612369

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