On aberration retrieval for optical microscopes in length metrology

Jan Krüger; Bernd Bodermann; Rainer Köning; Phillip Manley; Lin Zschiedrich; Philipp-Immanuel Schneider; Andreas Heinrich; Christian Eder; Ulrike Zeiser; Aksel Goehnermeier

doi:10.1117/12.2672294

23 August 2023 On aberration retrieval for optical microscopes in length metrology

Jan Krüger, Bernd Bodermann, Rainer Köning, Phillip Manley, Lin Zschiedrich, Philipp-Immanuel Schneider, Andreas Heinrich, Christian Eder, Ulrike Zeiser, Aksel Goehnermeier

Author Affiliations +

Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC126190A (2023) https://doi.org/10.1117/12.2672294
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

In this contribution, we present a technique for the determination of optical aberrations, which is based on measurements of the point spread function and a Bayesian optimization of rigorous simulations. The measuring system is a UV-microscope in a reflected light configuration with a 200x magnification, unpolarized light, and an illumination and imaging NA of 0.44 and 0.55, respectively. The PSF is measured by imaging a small quadratic chrome dot (side length ≈ 180 nm) on a glass substrate. We investigate the impact of different adjustment states, different dot locations and different optical microscopes.

Conference Presentation

Citation Download Citation

Jan Krüger, Bernd Bodermann, Rainer Köning, Phillip Manley, Lin Zschiedrich, Philipp-Immanuel Schneider, Andreas Heinrich, Christian Eder, Ulrike Zeiser, and Aksel Goehnermeier "On aberration retrieval for optical microscopes in length metrology", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC126190A (23 August 2023); https://doi.org/10.1117/12.2672294

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available