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23 August 2023 Efficient simulation of microscopic imaging for reconstruction of nanostructures
Phillip Manley, Jan Krüger, Bernd Bodermann, Rainer Köning, Andreas Heinrich, Christian Eder, Aksel Goehnermeier, Ulrike Zeiser, Martin Hammerschmidt, Lin Zschiedrich, Philipp-Immanuel Schneider
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Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC126190B (2023) https://doi.org/10.1117/12.2673077
Event: SPIE Optical Metrology, 2023, Munich, Germany
Abstract
Dimensional optical microscopy allows for the rapid inspection of devices at the cost of limited accuracy. Introducing a model-based approach that includes diffraction effects allows for increased accuracies. The model needs to be efficient and accurate to evaluate the measurements in an acceptable time frame. We present an overview of the illumination model and different incidence-pupil sampling techniques. Furthermore, we will demonstrate strategies for efficiently calculating the near-field scattering response from structures using the finite element method. Using these aspects, we demonstrate a significant increase in the accuracy of dimensional estimates for a range of structures.
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Phillip Manley, Jan Krüger, Bernd Bodermann, Rainer Köning, Andreas Heinrich, Christian Eder, Aksel Goehnermeier, Ulrike Zeiser, Martin Hammerschmidt, Lin Zschiedrich, and Philipp-Immanuel Schneider "Efficient simulation of microscopic imaging for reconstruction of nanostructures", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC126190B (23 August 2023); https://doi.org/10.1117/12.2673077
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KEYWORDS
Nanostructures
Electron microscopy
Diffraction
Diffraction limit
Scattering
Modeling
Multilayers
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