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13 March 2024 Iridium processing of metasurfaces for infrared optical applications
Zachary Kranefeld, T. Pan Menasuta, John McElearney, Victor Vazquez, Kevin Grossklaus, Thomas Vandervelde
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Proceedings Volume PC12888, 2D Photonic Materials and Devices VII; PC128880N (2024) https://doi.org/10.1117/12.3001949
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
Iridium (Ir) is a refractory metal commonly seen in industrial applications, but has great potential for optical applications including metasurfaces. Metasurfaces are used to control the optical properties of an interface via sub-wavelength surface structures. These patterns require sharply defined features to create precise optical phase interactions. For high-temperature environments, most materials are insufficient candidates for metasurfaces because the sharpness of the surface structures are lost due to edge-rounding or oxidation. Ir is better suited for metasurface applications in high-temperature environments but the patterning of Ir using nanofabrication techniques has not been thoroughly investigated. In this work, Ir metasurfaces were fabricated and characterized for optical applications in the infrared.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Zachary Kranefeld, T. Pan Menasuta, John McElearney, Victor Vazquez, Kevin Grossklaus, and Thomas Vandervelde "Iridium processing of metasurfaces for infrared optical applications", Proc. SPIE PC12888, 2D Photonic Materials and Devices VII, PC128880N (13 March 2024); https://doi.org/10.1117/12.3001949
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KEYWORDS
Iridium
Infrared radiation
Optics manufacturing
Reactive ion etching
Scanning electron microscopy
Spectroscopic ellipsometry
Sputter deposition
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