Mr. T. Pan Menasuta Profile

T. Pan Menasuta

at Tufts Univ

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Publications (1)

Proceedings Article | 13 March 2024 Presentation

Iridium processing of metasurfaces for infrared optical applications

Zachary Kranefeld, T. Pan Menasuta, John McElearney, Victor Vazquez, Kevin Grossklaus, Thomas Vandervelde

Proceedings Volume PC12888, PC128880N (2024) https://doi.org/10.1117/12.3001949

KEYWORDS: Iridium, Infrared radiation, Reactive ion etching, Optics manufacturing, Scanning electron microscopy, Vacuum chambers, Thin films, Thin film deposition, Sputter deposition, Spectroscopic ellipsometry

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