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Basic Imaging Theory
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p13
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Abstract
This excerpt gives a succinct explanation of Basic Imaging Theory.
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KEYWORDS
Objectives
Photomasks
Diffraction
Light sources
Semiconducting wafers
Image acquisition
Imaging systems
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