Guest Editorial: A Transition for JM3

Chris Mack

doi:10.1117/1.JMM.19.1.010101

12 February 2020 Guest Editorial: A Transition for JM³

Chris Mack

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 19, Issue 1, 010101 (February 2020). https://doi.org/10.1117/1.JMM.19.1.010101

Abstract

This guest editorial by former Editor-in-Chief Chris Mack introduces JM3’s new co-editors-in-chief, Harry Levinson and Hans Zappe.

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Chris Mack "Guest Editorial: A Transition for JM³," Journal of Micro/Nanolithography, MEMS, and MOEMS 19(1), 010101 (12 February 2020). https://doi.org/10.1117/1.JMM.19.1.010101

Published: 12 February 2020

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KEYWORDS

Lithography

Heat treatments

Metrology

Microelectromechanical systems

Microopto electromechanical systems

Semiconductors

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