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Alberto Lopez-Gomez
at Qoniac GmbH
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Publications (1)
Proceedings Article | 28 April 2023 Poster + Paper
Focus spot monitoring: design of an automatable detection, classification, and impact analysis pipeline
Syed Naime Mohammad, Sven Boese, Philip Groeger, Holger Bald, Alberto Lopez-Gomez, Clemens Utzny, Stefan Buhl
Proceedings Volume 12494, 1249416 (2023) https://doi.org/10.1117/12.2657970
KEYWORDS: Semiconducting wafers, Lithography, Zernike polynomials, Particles, Optical lithography, Semiconductor manufacturing, Modeling, Design and modelling, Scanners, Yield improvement
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