Dr. Fabrizio Siviero
at SAES Getters SpA
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 31, 2012
Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII
KEYWORDS: Microelectromechanical systems, Microbolometers, Thin films, Methane, Sensors, Metals, Gases, Carbon monoxide, Thin film devices, Instrument modeling

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