Prof. Hiroaki Kawata
at Osaka Prefecture Univ
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | May 10, 2016
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Polymethylmethacrylate, Mechanics, Silicon, Computer simulations, Transmission electron microscopy, Finite element methods, Nanoimprint lithography, Neodymium, Photoresist processing

PROCEEDINGS ARTICLE | July 28, 2014
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Lithography, Numerical simulations, Collimation, Transmittance, Photomasks, Geometrical optics, Binary data, Light wave propagation, Resolution enhancement technologies, Phase shifts

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, Collimation, Transmittance, Photomasks, Geometrical optics, Binary data, Light wave propagation, Resolution enhancement technologies, Phase shifts

PROCEEDINGS ARTICLE | May 27, 2009
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Electron beams, Dry etching, Crystals, Silicon, Mask making, Nanoimprint lithography, Motion models, Photomicroscopy, Crystallography, Nanolithography

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Lithography, Optical lithography, Quartz, Dry etching, Polymers, Ultraviolet radiation, Nickel, Chromium, Nanoimprint lithography, Photoresist processing

PROCEEDINGS ARTICLE | August 31, 2006
Proc. SPIE. 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III
KEYWORDS: Polymethylmethacrylate, Quartz, Polymers, Ultraviolet radiation, Coating, Scanning electron microscopy, Printing, Nanoimprint lithography, Thin film coatings, Yield improvement

Showing 5 of 7 publications
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