Prof. Le Luo
at SMIT
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Oxides, Copper, Indium, Nitrogen, Solids, Semiconducting wafers, Plasma treatment, Wafer bonding, Plasma, Tin

PROCEEDINGS ARTICLE | May 7, 2004
Proc. SPIE. 5281, Optical Transmission, Switching, and Subsystems
KEYWORDS: Microelectromechanical systems, Transceivers, Optical components, Silicon, Fiber lasers, Semiconductor lasers, Optical benches, Optical alignment, Semiconducting wafers, Optics manufacturing

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