Dr. Michael J. Walsh
Director Product Development at Exogenesis Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | November 23, 2015
Proc. SPIE. 9632, Laser-Induced Damage in Optical Materials: 2015
KEYWORDS: Polishing, Data modeling, Argon, Chemical species, Sputter deposition, Laser induced damage, Particles, Ions, Calcium, Laser processing, Laser damage threshold, Surface finishing

PROCEEDINGS ARTICLE | October 31, 2014
Proc. SPIE. 9237, Laser-Induced Damage in Optical Materials: 2014
KEYWORDS: Polishing, Contamination, Argon, Chemical species, Sputter deposition, Crystals, Ions, Radium, Natural surfaces, Surface finishing

PROCEEDINGS ARTICLE | March 18, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Polishing, Argon, Chemical species, Sputter deposition, Ions, Surface roughness, Photomasks, Extreme ultraviolet, Surface finishing, Chemical mechanical planarization

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