Misako Saito
Group Leader at Tokyo Electron AT Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 December 2008 Paper
Kensuke Inai, Kaoru Ohya, Hideaki Kuwada, Ryosuke Kawasaki, Misako Saito, Kaoru Fujihara, Teruyuki Hayashi, Jack Jau, Kenichi Kanai
Proceedings Volume 7140, 71400X (2008) https://doi.org/10.1117/12.804461
KEYWORDS: Silica, Silicon, Selenium, Scanning electron microscopy, Monte Carlo methods, Defect inspection, Electron beams, Electron transport, Particles, Defect detection

Proceedings Article | 16 April 2008 Paper
Proceedings Volume 6922, 69223E (2008) https://doi.org/10.1117/12.771863
KEYWORDS: Defect detection, Defect inspection, Inspection, Scanning electron microscopy, Tin, Metals, Electron beams, Photomasks, Semiconducting wafers, Monte Carlo methods

Proceedings Article | 5 April 2007 Paper
Teruyuki Hayashi, Misako Saito, Kaoru Fujihara, Setsuko Shibuya, Y. Kudou, Hiroshi Nagaike, Joseph Lin, Jack Jau
Proceedings Volume 6518, 65184C (2007) https://doi.org/10.1117/12.711301
KEYWORDS: Defect inspection, Inspection, Inspection equipment, Critical dimension metrology, Etching, Semiconducting wafers, Resistance, FT-IR spectroscopy, Electron beams, Defect detection

Proceedings Article | 24 March 2006 Paper
Misako Saito, Teruyuki Hayashi, Kaoru Fujihara, Kazuha Saito, Joseph Lin, Ryotaro Midorikawa
Proceedings Volume 6152, 615248 (2006) https://doi.org/10.1117/12.656090
KEYWORDS: Defect detection, Electron beams, Inspection, Defect inspection, Scanning electron microscopy, Monte Carlo methods, Photoresist processing, Manufacturing, Bridges, Resistance

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