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Nader Pakdaman
President/CEO at tau-Metrix Inc
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Author
Publications (3)
Proceedings Article | 10 April 2013 Paper
Performance-based metrology of critical device performance parameters for in-line non-contact high-density intra-die monitor/control on a 32nm SOI advanced logic product platform
Mario Pelella, Anda Mocuta, Birk Lee, Noah Zamdmer, Dustin Slisher, Xiaojun Yu, James Vickers, Yota Tsuruta, Subramanian Iyer, Nader Pakdaman
Proceedings Volume 8681, 86813F (2013) https://doi.org/10.1117/12.2025869
KEYWORDS: Semiconducting wafers, Dysprosium, Metrology, Photodiodes, Logic, Manufacturing, Control systems, Process control, Standards development, Oscillators
Proceedings Article | 24 March 2009 Paper
Comparison of physical gate-CD with in-die at-speed non-contact measurements for bin-yield and process optimization
J. Vickers, J. Galvier, W. Doedel, G. Steinbrueck, B. Borot, M. Gatefait, P. Gouraud, P. Gros, G. Johnson, M. Babazadeh, M. Pelella, N. Pakdaman
Proceedings Volume 7272, 72724C (2009) https://doi.org/10.1117/12.823822
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Optical lithography, Signal detection, Process control, Manufacturing, Oscillators, Reticles, Control systems
Proceedings Article | 15 March 2006 Paper
First look at across-chip performance and process noise using non-contact performance-based metrology
Majid Babazadeh, Bertrand Borot, Wim Doedel, José Estabil, Jean Galvier, Gloria Johnson, Nader Pakdaman, Gary Steinbrueck, James Vickers
Proceedings Volume 6155, 615502 (2006) https://doi.org/10.1117/12.683362
KEYWORDS: Semiconducting wafers, Metrology, Reticles, Oscillators, Metals, Manufacturing, Logic, Design for manufacturing, Nondestructive evaluation, CMOS technology
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