Dr. Song Peng
Managing Director at Mightex Systems
SPIE Involvement:
Publications (8)

Proceedings Article | 30 December 1999 Paper
Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373328
KEYWORDS: Photomasks, Diffraction, Image transmission, Phase shifting, Etching, Image processing, Error analysis, Critical dimension metrology, Quartz, Wet etching

Proceedings Article | 30 December 1999 Paper
Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373310
KEYWORDS: Reticles, Inspection, Photomasks, Quartz, Defect inspection, Manufacturing, Binary data, Etching, Semiconducting wafers, Scanning electron microscopy

Proceedings Article | 14 June 1999 Paper
Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350859
KEYWORDS: Phase measurement, Photomasks, Phase shifts, Interferometry, Phase shifting, Image analysis, Fringe analysis, Interferometers, Lithography, Etching

Proceedings Article | 1 September 1998 Paper
Song Peng, William Adair
Proceedings Volume 3412, (1998) https://doi.org/10.1117/12.328811
KEYWORDS: Etching, Photomasks, Phase shifts, Critical dimension metrology, Reactive ion etching, Molybdenum, Image processing, Quartz, Plasma etching, Plasma

Proceedings Article | 7 May 1996 Paper
Proceedings Volume 2689, (1996) https://doi.org/10.1117/12.239641
KEYWORDS: Optical filters, Diffraction gratings, Reflection, Diffraction, Wave propagation, Photoresist materials, Waveguides, Interference filters, Waveguide modes, Antennas

Showing 5 of 8 publications
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