Dr. Viorel Dragoi
Chief Scientist Permanent Wafer Bonding at EV Group GmbH
SPIE Involvement:
Conference Program Committee | Author
Publications (13)

PROCEEDINGS ARTICLE | June 14, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Mirrors, Light emitting diodes, Metals, Annealing, Copper, Interfaces, Diffusion, Solids, Microelectronics, Semiconducting wafers, Wafer bonding, Liquids, Tin

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Gold, Sensors, Metals, Glasses, Annealing, Silicon, Manufacturing, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | May 17, 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Metals, Copper, Interfaces, Scanning electron microscopy, Deposition processes, Semiconducting wafers, Wafer bonding, Liquids, Tin

PROCEEDINGS ARTICLE | May 17, 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Particles, Control systems, Transducers, Process control, Cavitation, Acoustics, Semiconducting wafers, Wafer testing, Wafer bonding, Surface finishing

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Microelectromechanical systems, Oxides, Contamination, Metals, Annealing, Interfaces, Manufacturing, Semiconducting wafers, Adhesives, Wafer bonding

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Statistical analysis, Polymers, Particles, Interfaces, Silicon, Coating, Semiconducting wafers, Adhesives, Wafer bonding, Standards development

Showing 5 of 13 publications
Conference Committee Involvement (4)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
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