Weichen Liu
at Institute of Microelectronics, CAS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 March 2019 Paper
Baolin Zhang, Weichen Liu, Zhengping Zhang, Lingkuan Meng
Proceedings Volume 10960, 109601G (2019) https://doi.org/10.1117/12.2514673
KEYWORDS: Directed self assembly, Silicon, Annealing, Polymers, Hydrogen, Semiconductors

Proceedings Article | 25 March 2019 Paper
Proceedings Volume 10960, 109601J (2019) https://doi.org/10.1117/12.2514461
KEYWORDS: Polymers, Annealing, Directed self assembly, Coating, Microelectronics, Roads, Statistical analysis, Integrated circuits

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