Zhengchun Peng
at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | July 1, 2010
JM3 Vol. 9 Issue 03
KEYWORDS: Semiconducting wafers, Silicon, Array processing, Atomic layer deposition, Nanolithography, Scanning electron microscopy, Electron beam lithography, Solid state electronics, Silicon films, Etching

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Lithography, Microfluidics, Polymers, Ultraviolet radiation, Silicon, Photomasks, Neodymium, Semiconducting wafers, Wafer bonding, Liquids

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Gold, Lithography, Borosilicate glass, Polymethylmethacrylate, Glasses, X-rays, Surface roughness, Photomasks, Electroplating, X-ray lithography

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