PROCEEDINGS VOLUME 2641
MICROMACHINING AND MICROFABRICATION | 23-25 OCTOBER 1995
Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
IN THIS VOLUME

0 Sessions, 18 Papers, 0 Presentations
MICROMACHINING AND MICROFABRICATION
23-25 October 1995
Austin, TX, United States
CRT/Optical Switches
Proc. SPIE 2641, Review of the current status of CRT technologies, 0000 (13 September 1995); doi: 10.1117/12.220927
Proc. SPIE 2641, Micromachined three-dimensional tunable Fabry-Perot etalons, 0000 (13 September 1995); doi: 10.1117/12.220937
Proc. SPIE 2641, Design and fabrication of ARROW thermo-optic modulators, 0000 (13 September 1995); doi: 10.1117/12.220938
Proc. SPIE 2641, Active interference filters using silicon-compatible materials, 0000 (13 September 1995); doi: 10.1117/12.220939
Proc. SPIE 2641, Realization of FDDI optical bypass switches using surface micromachining technology, 0000 (13 September 1995); doi: 10.1117/12.220940
Proc. SPIE 2641, Simulation and fabrication of ARROW directional couplers, 0000 (13 September 1995); doi: 10.1117/12.220941
Proc. SPIE 2641, Piezoelectric fiber optic modulators and microtubes, 0000 (13 September 1995); doi: 10.1117/12.220942
MEM Optical Devices
Proc. SPIE 2641, Projection display systems based on the Digital Micromirror Device (DMD), 0000 (13 September 1995); doi: 10.1117/12.220943
Proc. SPIE 2641, Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators, 0000 (13 September 1995); doi: 10.1117/12.220944
Proc. SPIE 2641, Fabrication of micromirror supported by electroplated nickel posts, 0000 (13 September 1995); doi: 10.1117/12.220928
Proc. SPIE 2641, MEMS arrays for deformable mirrors, 0000 (13 September 1995); doi: 10.1117/12.220931
Proc. SPIE 2641, Fabrication issues for silicon backplane active matrix miniature liquid crystal display, 0000 (13 September 1995); doi: 10.1117/12.220932
Proc. SPIE 2641, Gas-phase silicon micromachining with xenon difluoride, 0000 (13 September 1995); doi: 10.1117/12.220933
Proc. SPIE 2641, Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators, 0000 (13 September 1995); doi: 10.1117/12.220934
Proc. SPIE 2641, Fabrication and characterization of gated Si field emitter arrays with gate aperture below 0.5 um, 0000 (13 September 1995); doi: 10.1117/12.220935
Proc. SPIE 2641, Fabrication and characterization of the Pd-silicided emitters for field-emission devices, 0000 (13 September 1995); doi: 10.1117/12.220936
Plenary Papers
Proc. SPIE 2641, Projection displays and MEMS: timely convergence for a bright future, 0000 (13 September 1995); doi: 10.1117/12.220929
Proc. SPIE 2641, Recent trends in silicon micromachining technology, 0000 (13 September 1995); doi: 10.1117/12.220930
Back to Top