PROCEEDINGS VOLUME 3275
OPTOELECTRONICS AND HIGH-POWER LASERS AND APPLICATIONS | 24-30 JANUARY 1998
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
IN THIS VOLUME

0 Sessions, 22 Papers, 0 Presentations
OPTOELECTRONICS AND HIGH-POWER LASERS AND APPLICATIONS
24-30 January 1998
San Jose, CA, United States
Flatness Metrology
Proc. SPIE 3275, Novel method for beam collimation using multiple-beam shearing interferometry, 0000 (1 April 1998); doi: 10.1117/12.304405
Proc. SPIE 3275, New software algorithm of 3D surface profile measurement based on phase-shift interfering technology, 0000 (1 April 1998); doi: 10.1117/12.304406
Proc. SPIE 3275, New 3D surface profile measurement based on phase-shift interfering technology, 0000 (1 April 1998); doi: 10.1117/12.304407
Roughness Metrology
Proc. SPIE 3275, Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions, 0000 (1 April 1998); doi: 10.1117/12.304408
Proc. SPIE 3275, Round robin determination of power spectral densities of different Si wafer surfaces, 0000 (1 April 1998); doi: 10.1117/12.304409
Proc. SPIE 3275, Comparison of surface PSDs calculated from both AFM profiles and scatter data, 0000 (1 April 1998); doi: 10.1117/12.304410
Proc. SPIE 3275, Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements, 0000 (1 April 1998); doi: 10.1117/12.304389
Proc. SPIE 3275, Characteristics of a high-resolution displacement sensor using mode interference in the optical waveguide, 0000 (1 April 1998); doi: 10.1117/12.304390
Proc. SPIE 3275, X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness, 0000 (1 April 1998); doi: 10.1117/12.304391
Proc. SPIE 3275, Characterization of laser zone texture with laser Doppler vibrometry, 0000 (1 April 1998); doi: 10.1117/12.304392
Proc. SPIE 3275, Measurement on roughness of optical surface by focal plane CCD camera, 0000 (1 April 1998); doi: 10.1117/12.304393
Discrete Defect Metrology
Proc. SPIE 3275, Surface particle detection for the 0.07-um generation and beyond, 0000 (1 April 1998); doi: 10.1117/12.304394
Proc. SPIE 3275, Comparison of models and measurements of scatter from surface-bound particles, 0000 (1 April 1998); doi: 10.1117/12.304395
Proc. SPIE 3275, Modeling of scatter from small pits of arbitrary shape, 0000 (1 April 1998); doi: 10.1117/12.304396
Proc. SPIE 3275, Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, 0000 (1 April 1998); doi: 10.1117/12.304397
Proc. SPIE 3275, Analysis and characterization of In-film defects generated during sputter deposition of aluminum-alloy films, 0000 (1 April 1998); doi: 10.1117/12.304398
Proc. SPIE 3275, Use of new technology for enhanced detection of crystalline defects on silicon wafers, 0000 (1 April 1998); doi: 10.1117/12.304399
Related Topics
Proc. SPIE 3275, Scanning auger microscopy characterization of magnetic hard disks, 0000 (1 April 1998); doi: 10.1117/12.304400
Proc. SPIE 3275, Rapid and accurate determination of transparency, conductivity, etchability, patternability, and manufacturability of ITO films, 0000 (1 April 1998); doi: 10.1117/12.304401
Proc. SPIE 3275, Neural network approach to rapid thin film characterization, 0000 (1 April 1998); doi: 10.1117/12.304402
Proc. SPIE 3275, Novel DUV photoresist modeling by optical thin film decomposition from spectral ellipsometry/reflectometry data, 0000 (1 April 1998); doi: 10.1117/12.304403
Proc. SPIE 3275, High-accuracy detection and data processing of NRRO of spindle motor for HDD, 0000 (1 April 1998); doi: 10.1117/12.304404
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