Update of the development progress of the high power LPP-EUV light source using a magnetic field

Yuta Takashima; Yoshifumi Ueno; Takayuki Yabu; Tsukasa Hori; Georg Soumagne; Shinji Nagai; Tatsuya Yanagida; Yutaka Shiraishi; Kenichi Miyao; Hideyuki Hayashi; Yukio Watanabe; Tamotsu Abe; Hiroaki Nakarai; Takashi Saito; Hakaru Mizoguchi

doi:10.1117/12.2536397

26 September 2019 Update of the development progress of the high power LPP-EUV light source using a magnetic field

Yuta Takashima, Yoshifumi Ueno, Takayuki Yabu, Tsukasa Hori, Georg Soumagne, Shinji Nagai, Tatsuya Yanagida, Yutaka Shiraishi, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito, Hakaru Mizoguchi

Author Affiliations +

Proceedings Volume 11147, International Conference on Extreme Ultraviolet Lithography 2019; 111471M (2019) https://doi.org/10.1117/12.2536397
Event: SPIE Photomask Technology + EUV Lithography, 2019, Monterey, California, United States

Abstract

Gigaphoton Inc. has been developing a CO₂-Sn-LPP (LPP: Laser Produced Plasma) extreme ultraviolet (EUV) light source system for high-volume manufacturing (HVM) semiconductor lithography. Key components of the source include a high-power CO₂ laser with 15 ns pulse duration and 100 kHz repetition frequency, a solid-state pre-pulse laser with 10 ps pulse duration and a magnetic field debris mitigation system. To achieve 330 W with long collector mirror lifetime and stable output, we improved the performance of key system components; especially, the laser beam quality at 26 kW CO₂ laser output power by upgrading the CO₂ laser beam transfer system, the conversion efficiency (CE) by the optimization of plasma-related parameters to now 6 %, the dose stability and suppression of small Tin (Sn) debris by upgrading the shooting control system, the collector mirror degradation rate by the optimization of H₂ flow condition and changes in the EUV chamber structure. This paper presents the key technology update of our EUV light source.

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Yuta Takashima, Yoshifumi Ueno, Takayuki Yabu, Tsukasa Hori, Georg Soumagne, Shinji Nagai, Tatsuya Yanagida, Yutaka Shiraishi, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito, and Hakaru Mizoguchi "Update of the development progress of the high power LPP-EUV light source using a magnetic field", Proc. SPIE 11147, International Conference on Extreme Ultraviolet Lithography 2019, 111471M (26 September 2019); https://doi.org/10.1117/12.2536397

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